High-power impulse magnetron sputtering
Автор:
Jesse Russell,Ronald Cohn, 108 стр., издатель:
"Книга по Требованию", ISBN:
978-5-5149-5473-5
High Quality Content by WIKIPEDIA articles! High-power impulse magnetron sputtering (HiPIMS, also known as high-power pulsed magnetron sputtering, HPPMS) is a method for physical vapor deposition of thin films which is based on magnetron sputter deposition. HiPIMS utilises extremely high power densities of the order of kW?cm?2 in short pulses (impulses) of tens of microseconds at low duty cycle (on/off time ratio) of ...