Octadecyltrichlorosilane
Автор:
Jesse Russell,Ronald Cohn, издатель:
"VSD", ISBN:
978-5-5117-1561-2
High Quality Content by WIKIPEDIA articles! Octadecyltrichlorosilane (OTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its str