Resist
Автор:
Jesse Russell,Ronald Cohn, 76 стр., издатель:
"Книга по Требованию", ISBN:
978-5-5111-3888-6
High Quality Content by WIKIPEDIA articles! In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. A resist can be patterned via lithography to form a (sub)micrometer-scale, temporary mask that protects selected areas of the underlying substrate during subsequent processing steps. The material used to prepare said thin layer is typically a viscous solution. Resists are generally proprietary mixtures of a polymer or its precursor and other small molecules (e.g. photoacid generators) that have been specially formulated for a given lithography technology. Resists used during photolithography are called photoresists. Данное издание представляет собой компиляцию сведений, находящихся в свободном доступе в среде Интернет в целом, и в информационном сетевом ресурсе "Википедия" в частности. Собранная по частотным запросам указанной тематики, данная компиляция построена по принципу подбора близких...