Microlithography is the main technical driving force behind one of the most important phenomenon in the history of technology - microelectronics and the incredible shrinking transistor. These dramatic increases in electronic functionality per unit cost each year for early five decades, have transformed society. The gating piece of technology in this marvel of manufacturing progress has always been the process of lithography - the photochemical printing of circuit patterns onto semiconductor wafers. This text attempts a difficult task - to capture the fundamental principles of the incredibly fast-changing field of semiconductor microlithography in such a sway that these principles may be effectively applied to past, present and future microfabrication technology generations. Its focus is on the underlying scientific principles of optical lithography, rather than its practice. It will serve equally well as a university textbook (each chapter has an extensive set of problems) and...

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